| 摘要 |
<p>PURPOSE: To keep the whole of a spindle at a constant temperature by achieving effective use of a clean room by a method wherein a thermo element is controlled by information of a temperature sensor corresponding to a plurality of thermo elements arranged to a spindle housing. CONSTITUTION: A plurality of thermo elements 2 such as Peltier element or the like are arranged at specific intervals longitudinally and circumferentially on an inner wall of a cylindrical part of a spindle housing 1. Besides, a temperature sensor 3 is arranged corresponding to the thermo element 2, and the thermo element 2 and the temperature sensor 3 are respectively connected to a CPU. The spindle housing 1 is used by being incorporated in a dicer, a spindle equipped inside is rotated at a high speed, and the spindle and the housing 1 are heated. Variation in temperature of the housing 1 is detected with the temperature sensor 3 and inputted to the CPU. The CPU controls voltage of each thermo element 2 obtaining information from the temperature sensor 3, and controls temperature of the spindle so as to be kept constant.</p> |
