<p>In an aerostatic micro bearing intended to support or guide moving parts, one of the bearing surfaces is formed by monocrystalline silicon in which nozzle holes (2) for the feeding in of the air are formed by anisotropic etching (Figure 1). <IMAGE></p>
申请公布号
EP0578130(B1)
申请公布日期
1996.08.21
申请号
EP19930110498
申请日期
1993.07.01
申请人
HEINZL, JOACHIM, PROF. DR.-ING.
发明人
HEINZL, JOACHIM, PROF. DR.-ING;RUNGE, WOLFRAM, DR.-ING.
