| 摘要 |
PURPOSE: To generate laser abrasion phenomenon in patterning a rear electrode through laser irradiation by employing an irregular transparent conductive film having a specified haze rate as a transparent conductive film. CONSTITUTION: An irregular transparent conductive film, having haze rate in the range of 5-30%, is employed. Since the number of times of passing through an amorphous silicon layer is increased, the quantity of laser energy to be absorbed is also increased to cause abrasion easily. In the patterning of a thin film using pulse laser light having high energy density, a part 62 of the laser light 61 is absorbed by the thin film at the time of irradiation thus generating the abrasion phenomenon for imparting energy high enough to crack the molecular bond in the thin film and unbind the molecules thus scattering the film at a breath. |
