发明名称 Method of preparing carbon cluster film having electrical conductivity
摘要 A carbon cluster film has a precisely controlled stable electrical conductivity which does not deteriorate in a short period of time in air. Such a carbon cluster film having a stable electrical conductivity is formed by introducing an impurity into a thin film of fullerenes by ion implantation. The fullerenes include C60, C70 or the like.
申请公布号 US5538763(A) 申请公布日期 1996.07.23
申请号 US19940348740 申请日期 1994.12.02
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD. 发明人 UEBA, YOSHINOBU;OKUDA, NOBUYUKI;OHKURA, KENGO;KUGAI, HIROKAZU
分类号 C23C14/06;C30B23/02;C30B31/22;(IPC1-7):B05D3/06 主分类号 C23C14/06
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