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发明名称
SUBSTRATE EXPOSING METHOD BY AUTOMATIC ALIGNER
摘要
申请公布号
JPH08190201(A)
申请公布日期
1996.07.23
申请号
JP19950031108
申请日期
1995.02.20
申请人
IBIDEN CO LTD
发明人
JIKIYOU HIROSHI
分类号
G03F7/20;H05K3/00;(IPC1-7):G03F7/20
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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