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发明名称
SPUTTERING METHOD
摘要
申请公布号
JPH08188870(A)
申请公布日期
1996.07.23
申请号
JP19940338703
申请日期
1994.12.29
申请人
NEC CORP
发明人
YAMADA YOSHIAKI
分类号
C23C14/00;C23C14/06;C23C14/34;C23C14/35;H01L21/203;(IPC1-7):C23C14/34
主分类号
C23C14/00
代理机构
代理人
主权项
地址
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