发明名称 Interferometer using frequency modulation of the carrier frequency
摘要 A modulator (2) is provided for the periodic frequency modulation of laser light. Disposed downstream of a photo detector means (13, 14) is an electronic signal processing means (15, 18, 20, 20', 21, 21', 22, 26, 27) for detecting and evaluating the amplitude modulation of electric signals caused by frequency modulation of the laser light.
申请公布号 US5539520(A) 申请公布日期 1996.07.23
申请号 US19940335596 申请日期 1994.11.08
申请人 DR. JOHANNES HEIDENHAIN GMBH 发明人 TELLE, HARALD
分类号 G01B9/02;(IPC1-7):G01B9/02 主分类号 G01B9/02
代理机构 代理人
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