发明名称 |
MANUFACTURE OF QUANTUM STRUCTURE |
摘要 |
PURPOSE: To provide the manufacture of quantum structures for easily forming quantum structures in high density which have the same size, being arranged regularly close to one another. CONSTITUTION: This is of such constitution as to adopt a process of forming a silicon film 6 on a substrate 4 having uneven structure 4a and a process of fusing the silicon film 6 by heat treatment and selectively forming a ball- shaped silicon 5 on the recess 4b of the board 4 having uneven structure 4a. |
申请公布号 |
JPH08186245(A) |
申请公布日期 |
1996.07.16 |
申请号 |
JP19940328761 |
申请日期 |
1994.12.28 |
申请人 |
SONY CORP |
发明人 |
UESUTOUOOTAA JIYONASAN;GOSAIN DARAMU PARU;YAMAUCHI KAZUSHI;USUI SETSUO;JIYOOJI JIEI KORINZU;MASUDA HIDEKI |
分类号 |
H01L29/06;H01L21/205;(IPC1-7):H01L29/06 |
主分类号 |
H01L29/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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