发明名称 MANUFACTURE OF QUANTUM STRUCTURE
摘要 PURPOSE: To provide the manufacture of quantum structures for easily forming quantum structures in high density which have the same size, being arranged regularly close to one another. CONSTITUTION: This is of such constitution as to adopt a process of forming a silicon film 6 on a substrate 4 having uneven structure 4a and a process of fusing the silicon film 6 by heat treatment and selectively forming a ball- shaped silicon 5 on the recess 4b of the board 4 having uneven structure 4a.
申请公布号 JPH08186245(A) 申请公布日期 1996.07.16
申请号 JP19940328761 申请日期 1994.12.28
申请人 SONY CORP 发明人 UESUTOUOOTAA JIYONASAN;GOSAIN DARAMU PARU;YAMAUCHI KAZUSHI;USUI SETSUO;JIYOOJI JIEI KORINZU;MASUDA HIDEKI
分类号 H01L29/06;H01L21/205;(IPC1-7):H01L29/06 主分类号 H01L29/06
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