摘要 |
PURPOSE: To prevent unexposed or unetched part of a film by certainly detecting peel trouble of it. CONSTITUTION: An inlet conveyer 2 and outlet conveyer form a conveying means. It conveys in a specified direction a Cu-lined multilayer board having a surface layer covered with a cover film 6 pasted thereto as a substrate. Vibration pens 15, i.e., film nicking means, nick approx. central part of the edge 6a of the film at its top end in the moving direction. An air nozzle 16, i.e., an air jetting means, jets air on the nicked part from the top end in the moving direction enough to turn up the film 6. Film winding means 17 grips the turned up part due to the air jetting. A photoelectric sensor 18 is disposed at a position at which it is capable of detecting the turned up of both ends of the edge 6a of the film. |