| 摘要 |
Disclosed is a method of producing a stator blade for use in a turbo-molecular pump. The method includes subjecting a metal plate to a slitting process to form a blade element having an upstream edge surface and a downstream edge surface, wherein a laser beam is emitted onto the metal plate at an incident angle oblique to a principal surface of the metal plate. Thus, the upstream edge surface and/or the downstream edge surface can be formed to extend obliquely relative to the principal surface of the metal plate, in a simple manner, while eliminating a need for a burr removal operation which would otherwise be necessary in a punching-based slitting process.
|
