Electrostatic actuator and method of controlling the same

摘要

PCT No. PCT/JP92/00683 Sec. 371 Date Jan. 27, 1993 Sec. 102(e) Date Jan. 27, 1993 PCT Filed May 27, 1992 PCT Pub. No. WO92/22125 PCT Pub. Date Dec. 10, 1992.An electrostatic actuator incorporates a sensor for detecting both position and the state of distribution of charges and is efficiently driven in high-speed operation. A first member has a plurality of driving electrodes thereon, each having the shape of a strip, a second member is placed in contact with the first member, and a control means is provided for changing the voltages applied to the driving electrodes to produce relative movement of the first member and the second member. Detecting electrodes are arranged on the first member at predetermined phases, independently of the driving electrodes, and a detecting unit detects the position of the second member and the state of charges induced on the second member, through the detection of electric signals induced in the detecting electrodes by the charges distributed on the second member.