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发明名称
摘要
申请公布号
JP2512001(B2)
申请公布日期
1996.07.03
申请号
JP19870212078
申请日期
1987.08.26
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
YASUDA SHIGERU;TAKESHIMA KENJI;NOZAWA DAISUKE
分类号
H01L21/60;(IPC1-7):H01L21/60
主分类号
H01L21/60
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