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发明名称
SPUTTERING TARGET
摘要
申请公布号
JPH08170170(A)
申请公布日期
1996.07.02
申请号
JP19940313042
申请日期
1994.12.16
申请人
TOSOH CORP
发明人
UCHIUMI KENTARO;TAKAHARA TOSHIYA;KONDO AKIO;BABA HIRONOBU
分类号
C23C14/34;H01L21/203;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
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