发明名称 PROCESS AND DEVICE FOR LACQUERING OR COATING A SUBSTRATE
摘要 The invention pertains to a device for lacquering or coating a substrate (29) using a component (12) with a capillary gap (13, 14), having a container (10) filled with lacquer or coating liquid, the component (12) being disposed within the container (10) so that the capillary gap (13, 14) is immersed in the lacquer or coating liquid and the lacquer or coating liquid feeds into the capillary gap (13, 14) from the container (10), and having means (44) for moving the outlet (40) of the capillary gap (13, 14) relative to the container (10) in the vertical direction (28).
申请公布号 WO9619295(A1) 申请公布日期 1996.06.27
申请号 WO1995EP00905 申请日期 1995.03.11
申请人 STEAG MICRO/TECH GMBH STERNENFELS 发明人 APPICH, KARL;STUMMER, MANFRED
分类号 B05D1/26;B05C5/02;B05C9/02;B05C11/105;H01L21/00 主分类号 B05D1/26
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