发明名称 |
Solid state detector for sensing low energy charged particles |
摘要 |
A detector is provided for use in a solid state mass spectrograph for analyzing a sample of gas. The detector is adapted to detect the filtering of an ionized sample of the gas. The detector includes a linear array of detector elements, each detector element being connected to a Faraday cage having v-shaped conductors. The Faraday cage is formed on a cavity provided in a semiconductor substrate upon which the solid state mass-spectrograph is constructed. The detector elements include signal generators located outside of the cavity and connected to the Faraday cage, and charge sensing means in the form of either a MOS switch or a charge-coupled device.
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申请公布号 |
US5530244(A) |
申请公布日期 |
1996.06.25 |
申请号 |
US19940320466 |
申请日期 |
1994.10.07 |
申请人 |
NORTHROP GRUMMAN CORPORATION |
发明人 |
SRIRAM, SAPTHARISH;FREIDHOFF, CARL B. |
分类号 |
H01J49/28;(IPC1-7):B01D55/44;H01J49/00 |
主分类号 |
H01J49/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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