| 摘要 |
PURPOSE: To manufacture photoelectron material by depositing ultrafine particles in the voids of porous material by enclosing fluid containing the constituent elements of the ultrafine particles and porous material in a reaction vessel and causing a chemical reaction by irradiating the fluid with exciting light. CONSTITUTION: After setting dried, dehydrated, and porous zeolite crystals 14 in a reaction vessel 11 to which a light introducing window 12 can be provided for introducing exciting light into the container 11, raw material solution 13 is poured in the container 11 so that the zeolite crystals 14 can be sufficiently submerged in the solution 13. Then an ArF excimer laser beam 16 emitted from a light source 15 is introduced into the container 11 through an exciting light introducing optical system 17, a mirror 18, and the window 12. As a result, photochemical reaction is caused by the laser beam 16 and the regularly arranged voids of the zeolite crystals 14 are filled up with Si or C ultrafine particles. |
