| 摘要 |
PURPOSE: To obtain a highly insulating dense thin dielectric film without a crack or an interlaminar gap by repeatedly applying and drying a soln. of multiple alkoxides contg. plural metallic elements and heat-treating the resultant thin film laminated body at a specified temp. CONSTITUTION: When a thin film laminated body is formed on the surface of a substrate by repeatedly applying and drying a soln. of multiple alkoxides contg. plural metallic elements until a prescribed thickness is attained and the laminated body is fired to produce a thin dielectric film, the laminated body is heat-treated at a temp. above the crystallization temp. of multiple metallic oxides contg. the metallic elements in the alkoxides. A combination of at least one among Ba, Bi, Pb, La, Sr, Li, Ca and K with at least one among W, Ti, Ta, Nb, Mg and Zr is suitable for use as the metallic elements especially from the viewpoint of characteristics as a dielectric. |
