| 摘要 |
<p>An electrode (10) for use in a plasma reactor, and the like, is disclosed. The electrode (10) incorporates a high performance, miniature heat exchanger (20) and gas distribution manifold (20a) inside of the electrode (10). The electrode (10) comprises a bottom plate (11), a top plate (14), and an electrode holder (40). The bottom plate (11) is made of a solid heat conducting material with annular openings disposed in one surface and a gas exit pattern disposed between the annular openings and a second surface. The top plate (14) comprises gas distribution grooves that form a miniature gas distribution manifold (20a) that controllably distributes gas flow through the electrode (10), heat exchanger grooves that form the heat exchanger (20), and an opening (19) that permits gas to be supplied to the gas distribution manifold (20a). The electrode holder (40) mates to a gas input line (36) for supplying plasma gas to the electrode (10), and a coolant inlet (34) and coolant outlet (35) are provided that flow coolant to the heat exchanger (20). The design places the miniature heat exchanger (20) on top of the electrode (10) such that the heat generated by the plasma is efficiently removed while minimizing thermal gradients through the electrode (10). <IMAGE></p> |
