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发明名称
METHOD AND DEVICE FOR ALIGNING SUBSTRATE
摘要
申请公布号
JPH08152613(A)
申请公布日期
1996.06.11
申请号
JP19940297519
申请日期
1994.11.30
申请人
TOSHIBA CORP
发明人
KAJINO SEI
分类号
G02F1/13;G02F1/1333;(IPC1-7):G02F1/133
主分类号
G02F1/13
代理机构
代理人
主权项
地址
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