| 摘要 |
PURPOSE: To dispense with the frequent exchange of filter or the like and to prevent the re-sticking of an undissolved component to a glass substrate. CONSTITUTION: A prescribed process such as developing or etching is executed on a glass substrate G by spraying the processing liquid from a spray device 3. On the other hand, the undissolved component (foreign matter) is incorporated in the processing solution, which is stored in a processing vessel 11 and simultaneously the undissolved component falls along an inclined part 11b into the processing solution to be deposited on a cylindrical part 11c. A cap part 11d is opened in the horizontal direction in this state to discharge the deposited undissolved component to the outside together with the processing solution. The processing solution stored in the processing vessel 11 is pumped up through a pipe 12,... by a pumping device P and is sprayed again from the spray device 3 and the undissolved component remaining in the processing solution is removed by the filter. |
