发明名称 HEATER FOR VACUUM DEPOSITION OF ALLOY
摘要 PURPOSE:To perform the vacuum deposition of plural materials simultaneously depending on a single heating mechanism on purpose to obtain an alloy of homogeneous composition, by arranging plural sets of charging portions for the material of the vacuum deposition, and of different electric resistance, so as to supply respectively different electric power from a couple of heating electrodes.
申请公布号 JPS53124132(A) 申请公布日期 1978.10.30
申请号 JP19770038716 申请日期 1977.04.05
申请人 FUJITSU LTD 发明人 KOYAMA SHIYUUICHI
分类号 C23C14/26 主分类号 C23C14/26
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