| 摘要 |
<p>PURPOSE: To uniformize the thickness of a dielectric body and to improve the suction of an electrostatic chuck by baking a substrate formed of Al2 O3 or AlN ceramics, by flattening the surface by polishing, and by overlaying it with an electrode which contains Pd an Ag in a specific quantity or less and a dielectric body which consists mainly of TiO2 . CONSTITUTION: An electrostatic chuck has a dielectric body on the top layer, an electrode on the middle layer and a substrate on the bottom layer, and TiO2 is used for the dielectric body to improve dielectric constant and improve suction. For the electrode, Pd-Ag material which can be baked in the atmosphere is used, and the material is composed of Ag of 65wt.% or less, concerning the baking temperature. The substrate is formed of Al2 O3 or AlN ceramics. The substrate is prebaked, its surface is flattened by polishing and overlaid with the electrode. A dielectric sheet is bonded by thermocompression to form the electrostatic chuck. Thus, even when the dielectric sheet, which is bonded by thermocompression, is baked on the top plane of the flattened substrate, almost no substrate warpage is allowed on the substrate, so that the thickness of the dielectric body on the top plane is uniformized.</p> |
