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经营范围
发明名称
BONDING METHOD AND EQUIPMENT
摘要
申请公布号
JPH08124964(A)
申请公布日期
1996.05.17
申请号
JP19940262129
申请日期
1994.10.26
申请人
HITACHI LTD
发明人
TANIGAWA YOSHIYUKI;NARISAWA AKIHIKO
分类号
H01L21/60;(IPC1-7):H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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