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发明名称
PROBER DEVICE
摘要
申请公布号
JPH08124978(A)
申请公布日期
1996.05.17
申请号
JP19940256822
申请日期
1994.10.21
申请人
HITACHI LTD;HITACHI DEVICE ENG CO LTD
发明人
TABATA HIROSHI;SUGITA FUMIO;SAITO TETSUZO;HORI SATOSHI;UEMATSU MASAO;HANNO TSUTOMU
分类号
G01R1/073;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01R1/073
代理机构
代理人
主权项
地址
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