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发明名称
Method and apparatus for rapid thermal processing
摘要
申请公布号
GB9605135(D0)
申请公布日期
1996.05.08
申请号
GB19960005135
申请日期
1995.06.19
申请人
SAMSUNG ELECTRONICS CO LIMITED
发明人
分类号
C30B31/12;H01L21/00
主分类号
C30B31/12
代理机构
代理人
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