| 摘要 |
PURPOSE: To enable the energy distribution of a beam to be monitored at high resolution by allocating different monitoring areas to two monitor Faradays. CONSTITUTION: Monitor Faradays 12, 12 are placed near slits 8b, 8b provided in a mask 8. The monitor Faradays 12, 12 are placed in different positions with respect to the center axis O of a beam. The monitor Faraday 12 (12-1) detects the amount of beam current at a low scanning voltage (small deflection angle), and the monitor Faraday 12 (12-2) detects the amount of beam current at a high scanning voltage (large deflection angle), and a contamination disposal system 17 calculates the energy distribution of the beam from the amounts of beam currents. The monitor Faraday 12 (12-1) monitors a contamination beam which moves away from a main beam in the energy distribution, and the monitor Faraday 12 (12-2) separates and monitors another contamination beam which approaches the main beam in the energy distribution.
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