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发明名称
Verfahren und Gerät zur Beseitigung von Oberflächenbeschädigungen in Halbleiter-Materialien mittels Plasma-Ätzen
摘要
申请公布号
DE69301942(D1)
申请公布日期
1996.05.02
申请号
DE19936001942
申请日期
1993.02.19
申请人
HUGHES AIRCRAFT CO., LOS ANGELES, CALIF., US
发明人
ZAROWIN, CHARLES B., ROWAYTON, CT 06853, US;BOLLINGER, L. DAVID, RIDGEFIELD, CT 06877, US
分类号
H01L21/302;H01J37/32;H01L21/304;H01L21/3065;(IPC1-7):H01J37/32
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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