DEVICE AND METHOD FOR INSPECTING THIN-FILM TRANSISTOR

摘要

PURPOSE: To provide an inspection device or an inspection method for easily and positively inspect, with an improved reproducibility, even a thin-film transistor where no capacitor element is provided without poorly affecting the element. CONSTITUTION: This device is provided with an inspection signal generation means 6 for inputting a drive pulse signal and a test pulse signal to a gate electrode 2 and a test voltage generation means 7 for inputting a test voltage in synchronization with the drive pulse signal. An electrical signal outputted to an electrode 3 is detected by an electrical signal detection means 8 according to an external electrode 9 which is laid out opposite to a drive electrode 5 and forms an electrical capacity for storing a test electric charge at an area to the electrode 5 and an electrical capacity formed between the electrodes 5 and 9 in synchronization with a test pulse signal inputted to the electrode 2.