APPARATUS FOR DEPOSITING A LAYER OF MATERIAL ON A SUBSTRATE

摘要

Apparatus and method for producing amorphous or microcrystalline diamond-like smooth hard coatings on ceramics, glass and plastic for protection from chemical attack and abrasion are disclosed. In vacuum chamber (1) pulsed laser (2) directs a beam (3) through optical device (4), window (5) and lens (8) with mirrors (7a, b) of scanning device (10) positioning the focused beam (11) onto carbon target (12) to produce plume (18) of vaporized material. Coatings are produced by augmenting the plume with a capacitor circuit (13, 14, 15, 16). Energy stored in a capacitor is coupled via ring electrode (9) and the target to the plume in synchronization with the pulsed laser deposition process. Augmentation of the plume increases the energy and ionization of the deposition species and aids in expanding the area of the plume to match that of the substrate (19) on which the film is to be deposited. The target position is adjusted via linear actuator (17), which with the scanning device prevents damage to the target.