申请人 |
HERAEUS QUARZGLAS GMBH, 63450 HANAU, DE;SHIN-ETSU QUARTZ PRODUCTS CO., LTD., TOKYO, JP |
发明人 |
YAMAGATA, SHIGERU, KOHRIYAMA-SHI, FUKUSHIMA-KEN, JP;KURIYAMA, MICHIYOU, KOHRIYAMA-SHI, FUKUSHIMA-KEN, JP;INAKI, KYOICHI, KOHRIYAMA-SHI, FUKUSHIMA-KEN, JP;TAKKE, RALF, W-6450 HANAU 8, DE |