Sensor mfr. for large magnetoresistive effect sensor elements

摘要

The sensor arrangement includes four pairs of bridge elements in two parallel switched bridge branches. At least one bridge element exhibits a large magneto-resistive effect. Individual elements have different magnetic field sensitivities. All the elements are formed next to each other on one substrate (2). The substrate (2) has a carrier structure (8) and a coating (9). Three layers form a bias layer system. A lift-off technique is used to remove a structured varnish layer on the coating (5,9). The bridge elements (E11,E12,E21,E22) are adjacent each other on the substrate.