| 摘要 |
PURPOSE: To perform a high-speed recognition process by taking images of a subject to be detected on the outer periphery of a disc shaped substrate, using four cameras simultaneously. CONSTITUTION: A camera 15A held in place over a substrate 2 and a table are stacked so as to overlap each other, and cameras 15B, C, D which move in combination with one another by a predetermined pitch interval are mounted on the table of orthogonally intersecting X, Y leads driven by X, Y motors via ball screws. During inspection at the center of the substrate 2, the upper and lower cameras, and the right and left cameras are spaced from each other by a distance that is an integer multiple of a predetermined pitch interval between subjects to be detected, and the substrate 2 is moved by the predetermined pitch interval; during inspection at the right and left of the outer periphery of the substrate 2, the cameras 15B, C, D are moved to the right and left of the outer periphery, the substrate 2 is pitch driven up and down, then the distance between the right and left cameras is increased (reduced), and the substrate 2 is driven again in the vertical direction by the predetermined pitch interval; these actions are repeated until the end of the inspection; during inspection at the top and bottom of the outer periphery of the substrate 2, the cameras 15B, C, D are moved to the top and bottom of the outer periphery, the substrate is pitch driven to the right and left, then the distance between the upper and lower cameras is increased (reduced), and the substrate is driven again in the horizontal direction by the predetermined pitch interval; these actions are repeated. |
