PRODUCTION OF CARBON CLUSTER-CONTAINING HARD FILM

摘要

PURPOSE: To efficiently produce a carbon cluster-contg. hard film at a low cost. CONSTITUTION: A target 10 made of high purity SiC (or SiC-C, SiC-Si, etc.) is subjected to ablation with a pulsating laser beam 3 in inert gas (e.g. He) preferably under <20Torr pressure and the objective hard film contg. particles of a carbon cluster (C60 , C70 , etc.) dispersed in an SiC matrix is produced.