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发明名称
MANUFACTURE OF TRANSISTOR
摘要
申请公布号
JPH0888230(A)
申请公布日期
1996.04.02
申请号
JP19940221843
申请日期
1994.09.16
申请人
MATSUSHITA ELECTRON CORP
发明人
FUKUMOTO SHINJI
分类号
H01L29/73;H01L21/22;H01L21/223;H01L21/331;H01L29/732;(IPC1-7):H01L21/331
主分类号
H01L29/73
代理机构
代理人
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