| 摘要 |
PURPOSE: To manufacture a microconveyor capable of moving materials such as particles from one place to the other place on a silicon die by arranging a conductor having a specified pattern on an insulating material-made tube having an inner bore, an outer surface and the specified length along the length. CONSTITUTION: A plurality of ring-shaped conductors 120 are circumferentially arranged around an insulating material-made tube 110. A waveform generator 130 applies plural driving voltages to a plurality of conductors 132a, 132b and 132c connected to the selected conductors of the ring-shaped conductors 120 and having the same number as the driving voltages. The voltages are periodically changed, and the phases are deviated from each other. Therefore, traveling waves of the voltage are provided along the length of the tube 110, respective voltage waveforms applied to respective ring-shaped conductors 120 form electrostatic fields, and the cumulative effect of the electrostatic fields formed by all ring-shaped conductors become moving electric fields moving in one direction along the length of the tube 110. Particles advanced in the tube 110 and having electrostatic charge are propelled by the traveling waves through the tube 110. |
