发明名称 METHOD FOR EVALUATING SEMICONDUCTOR P-N JUNCTION ELEMENT
摘要 PURPOSE: To simply and rapidly detect the presence and the quantity of a carrier trap despite the omission of measuring a spectral sensitivity curve by irradiating a semiconductor P-N junction element with weak white light, and detecting the change of the spectral sensitivity characteristics of the element by measuring current-voltage characteristics. CONSTITUTION: Minority carrier trap of a semiconductor P-N junction element 5 is evaluated according to the change of the spectral sensitivity characteristics of the element 5. In such a method for evaluating the element 5, the change of the characteristics of the element 5 is detected by irradiating the element 5 of a dark state with weak white light 2, and measuring the current-voltage (&Delta;i-V) characteristics of the element 5 by the light 2. For example, the light 2 of about 0.2mW/cm<2> is emitted to a sample 5 via an optical chopper 3, and the DC current-voltage (I-V) and the output current-voltage (&Delta;i-V) characteristics by the light 2 are measured.
申请公布号 JPH0878495(A) 申请公布日期 1996.03.22
申请号 JP19940209542 申请日期 1994.09.02
申请人 AGENCY OF IND SCIENCE & TECHNOL 发明人 YUI NAOMASA;SEKIKAWA TOSHIHIRO
分类号 G01R31/26;G01M11/00;G01R31/36;H01L21/66;H01L31/04 主分类号 G01R31/26
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