发明名称 Method to fill contact holes in a semiconductor layer structure.
摘要 For filling via holes that extend onto interconnects to be contacted in a semiconductor layer structure, the interconnects are connected to a conductive layer through auxiliary via holes. The via holes are filled with metal by electro-deposition, whereby the interconnects are wired as a cooperating electrode in an electrolyte via an auxiliary contact to the conductive layer. Subsequently, the conductive layer is removed.
申请公布号 EP0644589(A3) 申请公布日期 1996.03.20
申请号 EP19940112936 申请日期 1994.08.18
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 HUEBNER, HOLGER, DR.
分类号 H01L21/288;C23C18/31;H01L21/768;H01L27/00;H05K3/42;H05K3/46 主分类号 H01L21/288
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