| 摘要 |
PURPOSE: To form a fine thin film by utilizing an electrostatic force alone or the electrostatic force and a piezoelectric effect as an auxiliary as a means for discharging a film forming material consisting of a soln.-like substance, discharging the soln. of the material in a stringy state, heating the soln. or allowing the soln. to stand at room temp. to vaporize the solvent in the soln. CONSTITUTION: A soln. 10 contg. a thin film forming material and a solvent dissolving the material and having >=10<5>Ωcm resistivity is discharged from a nozzle 13 in the direction of a member 11 to be coated with an electric field generated by impressing a voltage between a back electrode 12 and the nozzle 13 from a high-voltage power source 14. At this time, the soln. 10 is discharged in a stringy state. The soln. applied on the member 11 is heated by a heater block set adjacent to the member 11 as a mechanism to heat the member 11. Consequently, the solvent in the soln. is rapidly vaporized, and a fine thin film is formed on the member 11.
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