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发明名称
GRAPHITE CRUCIBLE FOR PULLING UP SEMICONDUCTOR SINGLE CRYSTAL
摘要
申请公布号
JPH0873292(A)
申请公布日期
1996.03.19
申请号
JP19940214974
申请日期
1994.09.08
申请人
TOSHIBA DENKO KK;AKUROSU:KK
发明人
YAMAZAKI HIROSHI;UCHIDA TAKESHI;MINOWA NOBUAKI;TAGUCHI YUJI;NAKAGAWA TAKAO;TACHIBANA MASAHARU;YAMASHITA MIHOKO
分类号
C30B15/10;C30B29/06;H01L21/208;(IPC1-7):C30B15/10
主分类号
C30B15/10
代理机构
代理人
主权项
地址
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