| 摘要 |
<p>PURPOSE: To improve heat transfer characteristics and durability by fusing and joining the plates of an insulator and a dielectric by the layer of a joint metal which is laid out in electrode shape metallurgically. CONSTITUTION: An attraction mechanism part 1 of an electrostatic chuck consists of a three-layer structure where the plate of a dielectric ceramic 2 is joined and formed in one piece on the plate of an insulator ceramic while holding the layer of an electrode metal 4. Then, the plates of an insulator 3 and the dielectric 2 are melted and joined metallurgically by a layer 4 of a joint metal which is laid out in electrode shape. Also, the attraction mechanism part 1 of the electrostatic chuck is brazed on a pedestal 5 consisting of carbon material or the compound material of carbon. Further, in a structure where the attraction mechanism part 1 is applied to the pedestal 5, the electrode side surface of the mechanism part 1 and the exposed surface of the pedestal are coated with ceramic insulation covering 6.</p> |
