| 摘要 |
PURPOSE: To provide a non-contact bearing type polygon scanner using a fluid bearing and having structure by which fluid is not leaked. CONSTITUTION: This non-contact bearing type polygon scanner is provided with a rotor part to which a polygon mirror 23 is attached and which is provided with a shaft 20 being the center of rotation, fluid bearing units 6, 7, 8, 9, 11 and 12 which are used as bearings of the rotor part and where the fluid 15 is injected in a bearing part 8a in which the shaft 20 is inserted, and driving coil units 1 and 2 applying rotational force to the rotor part; and a through-path 28 where the fluid is allowed to circulate is formed in the fluid bearing unit in the scanner. |
