| 摘要 |
PURPOSE: To reduce the detection error of the center position of an alignment mark by forming a prealignment mark at a separate position from that mark after forming a film on the surface of a metal film, and comparing the distance 'between the marks from an index of an exposure apparatus. CONSTITUTION: A mean center position 31 of an alignment mark 13 is at a distance ofα+γfrom an index 14. A prealignment mark 23 is formed at a position deviated by a distanceβfrom the position 31 and has the same spacing and size as the mark 13. The distance from the index 14 to the center position 33 of the mark 13 and distanceα+γfrom the position 31 of the mark 13 to the center position 32 of the. mark 23 are obtained to specify the measuring errorγ, of measured center position 31 of the mark 13. This error is fed back to an exposure apparatus and exposure is made.Thus a high accuracy exposure is made, without being influenced by the thickness of a metal film. |
