| 摘要 |
PURPOSE: To make a heat radiating source elecrically adjustable by coating a part, which floats above a substrate of filaments arranged in a well of a hole of the substrate, which a continuous this film. CONSTITUTION: Incandescent filaments 3 are arranged in a well or a hole 2 of a square-type single-crystal Si chip 1. Both ends of the filaments 3 are connected to contact pads 5 for supplying electric current to the filaments 3. The parts which freely float above a substrate 1 of the filaments made of a metal are coated with a continuous emission-improving film. The thin film is made of Si nitride. The emission region of the incandescent filaments 3 is 1 mm<2> . The filaments 3 float in air along the entire length and supported on both ends. Is under the filaments is generally etched to 100μm depth by etching and eached at least to a 10μm depth. The size of the filaments 3 is, for example, 1μm thick, 20μm wide, and 1 mm long, and the intervals of neighboring filaments are 5μm.
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