发明名称 Method of fabricating an electrically alterable resistive component on an insulating layer
摘要 A memory cell includes a pair of spaced apart conductors on an insulating layer, and a novel electrically alterable resistive component between the conductors. This resistive component consist essentially of silicon, having a crystalline grain size which is smaller than polycrystalline with dopant atoms that are interstitial in the silicon. Process temperatures are limited such that the dopant atoms remain interstitial and do not become substitutional.
申请公布号 US5496763(A) 申请公布日期 1996.03.05
申请号 US19940337807 申请日期 1994.11.14
申请人 UNISYS CORPORATION 发明人 ROESNER, BRUCE B.
分类号 H01L27/112;(IPC1-7):H01L29/04;H01L21/70 主分类号 H01L27/112
代理机构 代理人
主权项
地址