| 摘要 |
The rectifying element is comprised of two electrodes, an undoped diamond film, and a B-doped p-type diamond film. The diamond films are formed of highly-oriented diamond films, of which at least 80% of the surface area consists of (100) or (111) crystal planes, and the differences { DELTA alpha , DELTA beta , DELTA gamma } of Euler angles { alpha , beta , gamma }, which represent the orientations of crystal planes, simultaneously satisfy | DELTA alpha |</=5 DEG , | DELTA beta |</=5 DEG and | DELTA gamma |</=5 DEG between adjacent crystal planes. The diamond rectifying element thus constructed have an excellent electrical characteristics, and multiple of the elements can be produced on a large area at low cost. The diamond rectifying elements can be used for heat-resistant and high-power rectifying elements.
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