发明名称 HOT CATHODE STRUCTURE AND ELECTRON BEAM WORKING DEVICE USING THIS HOT CATHODE STRUCTURE
摘要 PURPOSE:To simplify the conversion work of a hot cathode and make the handling of the cathode easy by integrally forming the hot cathode and heaters, CONSTITUTION:A hot cathode structure has such structure that a hot cathode 101 is interposed between a pair of heaters 102a and 102b, and the hot cathode 101 and the heaters 102a, 102b are integrated by current-carrying between the heaters 102a, 102b for heating. The hot cathode 101 is one obtained by integrating an ion shock resistant, high melting point, heat resistant material and an electron emitting material, and is preferable to have the integral structure obtained by current-carrying between the heaters 102a, 102b. The hot cathode 101 is preferable to integrate the heaters 102a, 102b by a hot isotropic heat treatment.
申请公布号 JPH0850873(A) 申请公布日期 1996.02.20
申请号 JP19940185575 申请日期 1994.08.08
申请人 NEC KANSAI LTD;NEC CORP 发明人 ISHIDA HISANORI;NAKAMURA TSUYOSHI;NARITA KAZUNORI;SUGIMURA TOSHIKAZU;SAKATANI HIROYUKI;TANABE TAKESHI
分类号 H01J1/15;H01J37/06 主分类号 H01J1/15
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