| 摘要 |
PURPOSE:To prevent short circuit between stack electrodes arranged on the opposite sides of a suspended part due to the residue being left in a recess between lower layer word lines after formation of the stack electrode through etching. CONSTITUTION:The clearance 38 at a suspended part provided for an electrode layer facing the contact holes at the suspended part is widened so that a recess 24 between lower layer word lines 1 is exposed to the clearance 38 at the suspended part. Since the etching residue after formation of a stack electrode is removed when the facing electrode layer 3 is overetched, short circuit is prevented. |
