MEASURING METHOD FOR IMPURITY IN SEMICONDUCTOR BOARD,申请号JP19940176384-传众专利搜索

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发明名称	MEASURING METHOD FOR IMPURITY IN SEMICONDUCTOR BOARD
摘要
申请公布号	JPH0843334(A)	申请公布日期	1996.02.16
申请号	JP19940176384	申请日期	1994.07.28
申请人	NEC CORP	发明人	TANABE AKIRA
分类号	G01N27/00;H01L21/66;(IPC1-7):G01N27/00	主分类号	G01N27/00
代理机构		代理人
主权项
地址

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