发明名称 APPARATUS AND METHOD FOR POSITIONING OF BOARD
摘要 <p>PURPOSE:To reduce the friction force between a board and a stage and move the board smoothly to be pressed against reference blocks securely when the board is pushed by floating the board slightly off the upper surface of the stage by the blowing pressure of air. CONSTITUTION:First, air is made to blow up from blowing holes 5 provided in a stage 2. A board 10 is made to float with a little distance by the blowing pressure of the air to reduce the friction force between the rear of the board 10 and the upper surface 2a of the stage 2, so that the board 10 can be moved smoothly. In this state, a pushing arm 4 is operated to move the board 10 without a resistance and the circumference of the board 10 is pressed against reference blocks 3a-3c easily. Therefore, the board 10 can be positioned securely. The blowing air is sucked into a suction hole 6. Thus, by making the directions of the blowing air flow from the inside to the suction hole 6 at the center, dusts, etc., are not scattered around the stage 2.</p>
申请公布号 JPH0846017(A) 申请公布日期 1996.02.16
申请号 JP19940197375 申请日期 1994.07.29
申请人 SONY CORP 发明人 NODA KATSUHIRO;TANAKA SHINICHI
分类号 B23Q3/18;H01L21/68;(IPC1-7):H01L21/68 主分类号 B23Q3/18
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