| 摘要 |
PURPOSE:To prevent variation in inspection accuracy of optical sensors by warpage and deflection of glass substrates by forming grooves for evacuation of jigs in correspondence to shapes of multilayouts of color filters and panels on the glass substrates. CONSTITUTION:The glass substrates for multilayouts of the color filters are attracted by vacuum chucks and are fixed to an inspection apparatus by utilizing the parts thereof which are not the color filters at the time of inspecting the color filters. The vacuum chucks 2 are formed to the shape of a square with a cross inside and the grooves 6 are formed in the cruciform parts as well. The supporting span Ls of the glass substrates 9 is set at 1/2. The deflection by their own weight of the glass substrates 9 is proportional to the power of four of the span Ls by their own weight of the glass substrates 9 and, therefore, the deflection of the glass substrates 9 is 1/16 and the warpage and deflection of the glass substrates 9 are lessened. Then, the detecting capacity of the optical sensors is made nearly constant in any part. |
